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10.3.4Uniformity Correction and High Precision
Adjustment
,,,xy
After the area correction, generally speaking, the precision can meet the
requirements. If the uniformity can not meet the requirements, you can
increase the equal scale correction in the x and y directions.
“”,:
Check the “Equal Scale Method” and the following interface appears:
10.3.4.1 X Scale Parameter Adjustment in X Direction
,“X,X
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